|
|
|
|
|
| |
 |
| |
 |
|
|
| |
In-Line System is an equipment of connecting all the process chambers of various batch process for the
productivity improvement.
It is generally consisted in heating, etching, process, buffer and unloading chamber and is suitable to the
production of glass and acrylic sheet.
In-Line System commonly adopts the magnetron sputtering method and the Arc ion plating method can be
sometimes used.
|
|
| |
Consist in Heating, Etching, Process, Buffer and Unloading chamber
Using MSS type or AIPS type
1) Suitable to large sized glasst and sheet
2) High Productivity & Reliability
3) Full auto process
4) Compiling database for each chamber
5) High yield target erosion ( 40% )
6) Large sized plasma cleaning system
|
 |
|
|
| |
1)
ITO, metal and AR coatings for flat panel displays
2)
CrN coating for automobile components
3)
Metal coating for electric components
4)
EMI coating for cellular telephone cover
5)
Half mirror coating
6)
TiN for decorative components |
|
|
|
|
