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| Home > Products > Vacuum coating machine |
Vacuum coating machine |
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Magnetron Sputtering System is an equipment used in coating of a thin-film on the substrate by forcing the
atoms to bounce out and accelerating it from the collisions of high-energy ions on the target surface.
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UBM Type : Suitable coating for metal, ceramic, lubrication, EMI and insulation
Excellent adhesion with IEGD ( Ion Enhanced Glow Discharge ) method
1) Long distance coating with UBM mode
2) Very smooth surface
3) Fine, High-density films
4) Almost all the materials can be used for coating
5) High yield target erosion ( 40% )
6) Hybrid system (UBM + Arc or UBM + HCD)
7) Auto process in every step
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DLC, MoS2 , TiAl(Metal), TiAlN, TiCN, TiN, CrN Hard coating system 
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